Issued Patents 2002
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495459 | Solutions of metal-comprising materials, methods of forming metal-comprising layers, methods of storing metal-comprising materials, and methods of forming capacitors | Stefan Uhlenbrock | 2002-12-17 |
| 6455717 | Metal complexes with chelating O-and/or N-donor ligands | — | 2002-09-24 |
| 6452017 | Complexes having tris(pyrazolyl)methanate ligands | Stefan Uhlenbrock | 2002-09-17 |
| 6444041 | Methods, complexes, and system for forming metal-containing films | — | 2002-09-03 |
| 6445023 | Mixed metal nitride and boride barrier layers | Donald L. Westmoreland | 2002-09-03 |
| 6444818 | Metal complexes with chelating C-, N-donor ligands for forming metal-containing films | Stefan Uhlenbrock | 2002-09-03 |
| 6426292 | Methods for forming iridium and platinum containing films on substrates | — | 2002-07-30 |
| 6402126 | Method and apparatus for vaporizing liquid precursors and system for using same | David R. Atwell | 2002-06-11 |
| 6375754 | Processing compositions and methods of using same | — | 2002-04-23 |
| 6368518 | Methods for removing rhodium- and iridium-containing films | — | 2002-04-09 |
| 6368398 | Method of depositing films by using carboxylate complexes | — | 2002-04-09 |
| 6352580 | Complexes having tris(pyrazolyl)borate ligands for forming films | Stefan Uhlenbrock | 2002-03-05 |
| 6350686 | Organometallic compound mixtures in chemical vapor deposition | — | 2002-02-26 |
| 6348412 | Organometallic compound mixtures in chemical vapor deposition | — | 2002-02-19 |