Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489199 | Multiple step methods for forming conformal layers | Gurtej S. Sandhu | 2002-12-03 |
| 6472309 | In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications | — | 2002-10-29 |
| 6395647 | Chemical treatment of semiconductor substrates | Li Li | 2002-05-28 |
| 6383951 | Low dielectric constant material for integrated circuit fabrication | — | 2002-05-07 |
| 6372643 | Method for forming a selective contact and local interconnect in situ and semiconductor devices carrying the same | Christopher W. Hill, Gurtej S. Sandhu | 2002-04-16 |
| 6368988 | Combined gate cap or digit line and spacer deposition using HDP | Sujit Sharan, Gurtej S. Sandhu | 2002-04-09 |