Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440635 | Low “K” factor hybrid photoresist | Steven J. Holmes, Ahmad D. Katnani, Niranjan M. Patel | 2002-08-27 |
| 6440801 | Structure for folded architecture pillar memory cell | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Howard L. Kalter +2 more | 2002-08-27 |
| 6426175 | Fabrication of a high density long channel DRAM gate with or without a grooved gate | Toshiharu Furukawa, Mark C. Hakey, Stevn J. Holmes, David V. Horak | 2002-07-30 |
| 6387783 | Methods of T-gate fabrication using a hybrid resist | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak | 2002-05-14 |
| 6372412 | Method of producing an integrated circuit chip using frequency doubling hybrid photoresist and apparatus formed thereby | Mark C. Hakey, Steven J. Holmes, David V. Horak, Ahmad D. Katnani, Niranjan M. Patel | 2002-04-16 |
| 6338934 | Hybrid resist based on photo acid/photo base blending | Kuang-Jung Chen, Mark C. Hakey, Steven J. Holmes, Wu-Song Huang | 2002-01-15 |