Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440635 | Low “K” factor hybrid photoresist | Steven J. Holmes, Ahmad D. Katnani, Paul A. Rabidoux | 2002-08-27 |
| 6372412 | Method of producing an integrated circuit chip using frequency doubling hybrid photoresist and apparatus formed thereby | Mark C. Hakey, Steven J. Holmes, David V. Horak, Ahmad D. Katnani, Paul A. Rabidoux | 2002-04-16 |