Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495429 | Controlling internal thermal oxidation and eliminating deep divots in SIMOX by chlorine-based annealing | Michael E. Adamcek, Anthony G. Domenicucci, Stephen Fox, Neena Garg, Kenneth J. Giewont +2 more | 2002-12-17 |
| 6486037 | Control of buried oxide quality in low dose SIMOX | Maurice Heathcote Norcott | 2002-11-26 |
| 6432754 | Double SOI device with recess etch and epitaxy | Fariborz Assaderaghi, Tze-Chiang Chen, K. Paul Muller, Edward J. Nowak, Ghavam G. Shahidi | 2002-08-13 |
| 6429488 | Densely patterned silicon-on-insulator (SOI) region on a wafer | Effendi Leobandung, Dominic J. Schepis, Ghavam G. Shahidi | 2002-08-06 |
| 6426252 | Silicon-on-insulator vertical array DRAM cell with self-aligned buried strap | Carl Radens, Gary B. Bronner, Tze-Chiang Chen, Bijan Davari, Jack A. Mandelman +3 more | 2002-07-30 |
| 6404014 | Planar and densely patterned silicon-on-insulator structure | Effendi Leobandung, Dominic J. Schepis, Ghavam G. Shahidi | 2002-06-11 |