Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463184 | Method and apparatus for overlay measurement | Chris Gould, V. C. Jai Prakash, Robert Willem Van Den Berg | 2002-10-08 |
| 6432754 | Double SOI device with recess etch and epitaxy | Fariborz Assaderaghi, Tze-Chiang Chen, Edward J. Nowak, Devendra K. Sadana, Ghavam G. Shahidi | 2002-08-13 |
| 6432829 | Process for making planarized silicon fin device | Edward J. Nowak, Hon-Sum Philip Wong | 2002-08-13 |