Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Hiroyuki Shinada, Mari Nozoe, Atsuko Takafuji +2 more | 2002-11-05 |
| 6394797 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa +2 more | 2002-05-28 |