Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6430491 | Speed ratio control system of continuously variable transmission | Kazutaka Adachi, Hiroyuki Ashizawa | 2002-08-06 |
| 6394797 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Masafumi Kanetomo, Shigeki Hirasawa, Tomoji Watanabe +2 more | 2002-05-28 |
| 6390513 | Collapsible spacer pipe | — | 2002-05-21 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |