Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6394797 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Shigeki Hirasawa, Tomoji Watanabe +2 more | 2002-05-28 |