Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462411 | Semiconductor wafer processing apparatus for transferring a wafer mount | Nobuyuki Mise, Toshiyuki Uchino, Norio Suzuki, Yoshihiko Sakurai, Toshiya Uenishi +3 more | 2002-10-08 |
| 6403479 | Process for producing semiconductor and apparatus for production | Akiko Kagatsume, Tadanori Yoshida | 2002-06-11 |
| 6394797 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa +2 more | 2002-05-28 |