Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444405 | Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate | Ryouichi Furukawa, Kazuyuki Suko, Masayuki Hiranuma, Koichi Saitoh, Hirohiko Yamamoto +2 more | 2002-09-03 |
| 6403479 | Process for producing semiconductor and apparatus for production | Tomoji Watanabe, Akiko Kagatsume | 2002-06-11 |