Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497992 | Process for manufacturing semiconductor integrated circuit device | Takashi Yunogami, Shunji Sasabe, Jun Abe, Takao Kumihashi, Fumio Murai | 2002-12-24 |
| 6444405 | Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate | Ryouichi Furukawa, Masayuki Hiranuma, Koichi Saitoh, Hirohiko Yamamoto, Tadanori Yoshida +2 more | 2002-09-03 |