Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497992 | Process for manufacturing semiconductor integrated circuit device | Takashi Yunogami, Shunji Sasabe, Kazuyuki Suko, Jun Abe, Takao Kumihashi | 2002-12-24 |
| 6394797 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa, Tomoji Watanabe +2 more | 2002-05-28 |
| 6383718 | Photomask and pattern forming method employing the same | Norio Hasegawa, Katsuya Hayano | 2002-05-07 |