Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444405 | Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate | Kazuyuki Suko, Masayuki Hiranuma, Koichi Saitoh, Hirohiko Yamamoto, Tadanori Yoshida +2 more | 2002-09-03 |