Issued Patents 2002
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475323 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-11-05 |
| 6468663 | Semiconductor substrate and process for producing the same | Nobuhiko Sato | 2002-10-22 |
| 6468923 | Method of producing semiconductor member | Kunio Watanabe, Tetsuya Shimada, Kazuaki Ohmi, Kiyofumi Sakaguchi | 2002-10-22 |
| 6451670 | Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate fabrication method | Toru Takisawa, Kenji Yamagata | 2002-09-17 |
| 6452091 | Method of producing thin-film single-crystal device, solar cell module and method of producing the same | Katsumi Nakagawa, Yasuyoshi Takai, Kiyofumi Sakaguchi, Noritaka Ukiyo, Masaaki Iwane +1 more | 2002-09-17 |
| 6448155 | Production method of semiconductor base material and production method of solar cell | Yukiko Iwasaki, Shoji Nishida, Kiyofumi Sakaguchi, Noritaka Ukiyo | 2002-09-10 |
| 6436226 | Object separating apparatus and method, and method of manufacturing semiconductor substrate | Kazuaki Omi, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-08-20 |
| 6429095 | Semiconductor article and method of manufacturing the same | Kiyofumi Sakaguchi | 2002-08-06 |
| 6427747 | Apparatus and method of separating sample and substrate fabrication method | Kazuaki Omi, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-08-06 |
| 6427748 | Sample processing apparatus and method | Kazutaka Yanagita, Kazuaki Omi, Kiyofumi Sakaguchi | 2002-08-06 |
| 6418999 | Sample separating apparatus and method, and substrate manufacturing method | Kazutaka Yanagita, Kazuaki Omi, Kiyofumi Sakaguchi | 2002-07-16 |
| 6391743 | Method and apparatus for producing photoelectric conversion device | Masaaki Iwane, Kazuaki Ohmi, Shoji Nishida, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-05-21 |
| 6383890 | Wafer bonding method, apparatus and vacuum chuck | Toru Takisawa, Kenji Yamagata | 2002-05-07 |
| 6382292 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-05-07 |
| 6350702 | Fabrication process of semiconductor substrate | Kiyofumi Sakaguchi | 2002-02-26 |