Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475323 | Method and apparatus for separating composite member using fluid | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-11-05 |
| 6468923 | Method of producing semiconductor member | Takao Yonehara, Kunio Watanabe, Tetsuya Shimada, Kiyofumi Sakaguchi | 2002-10-22 |
| 6426270 | Substrate processing method and method of manufacturing semiconductor substrate | Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-07-30 |
| 6391743 | Method and apparatus for producing photoelectric conversion device | Masaaki Iwane, Takao Yonehara, Shoji Nishida, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-05-21 |
| 6382292 | Method and apparatus for separating composite member using fluid | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-05-07 |
| 6376332 | Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method | Kazutaka Yanagita, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2002-04-23 |
| 6342433 | Composite member its separation method and preparation method of semiconductor substrate by utilization thereof | Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-01-29 |