Issued Patents 2002
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475323 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-11-05 |
| 6436226 | Object separating apparatus and method, and method of manufacturing semiconductor substrate | Kazuaki Omi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-08-20 |
| 6427748 | Sample processing apparatus and method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2002-08-06 |
| 6427747 | Apparatus and method of separating sample and substrate fabrication method | Kazuaki Omi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-08-06 |
| 6426270 | Substrate processing method and method of manufacturing semiconductor substrate | Kiyofumi Sakaguchi, Kazuaki Ohmi | 2002-07-30 |
| 6418999 | Sample separating apparatus and method, and substrate manufacturing method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2002-07-16 |
| 6391743 | Method and apparatus for producing photoelectric conversion device | Masaaki Iwane, Takao Yonehara, Kazuaki Ohmi, Shoji Nishida, Kiyofumi Sakaguchi | 2002-05-21 |
| 6391067 | Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus | Kiyofumi Sakaguchi | 2002-05-21 |
| 6382292 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-05-07 |
| 6380099 | Porous region removing method and semiconductor substrate manufacturing method | Kiyofumi Sakaguchi | 2002-04-30 |
| 6376332 | Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method | Kazuaki Ohmi, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2002-04-23 |
| 6342433 | Composite member its separation method and preparation method of semiconductor substrate by utilization thereof | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2002-01-29 |