Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436226 | Object separating apparatus and method, and method of manufacturing semiconductor substrate | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-08-20 |
| 6427747 | Apparatus and method of separating sample and substrate fabrication method | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-08-06 |
| 6427748 | Sample processing apparatus and method | Kazutaka Yanagita, Takao Yonehara, Kiyofumi Sakaguchi | 2002-08-06 |
| 6418999 | Sample separating apparatus and method, and substrate manufacturing method | Kazutaka Yanagita, Takao Yonehara, Kiyofumi Sakaguchi | 2002-07-16 |