Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6376332 | Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method | Kazutaka Yanagita, Kazuaki Ohmi, Kiyofumi Sakaguchi | 2002-04-23 |