Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468663 | Semiconductor substrate and process for producing the same | Takao Yonehara | 2002-10-22 |
| 6413874 | Method and apparatus for etching a semiconductor article and method of preparing a semiconductor article by using the same | — | 2002-07-02 |
| 6407367 | Heat treatment apparatus, heat treatment process employing the same, and process for producing semiconductor article | Masataka Ito | 2002-06-18 |
| 6375738 | Process of producing semiconductor article | — | 2002-04-23 |
| 6369905 | Information processing apparatus and output apparatus | Shunya Mitsuhashi, Satoshi Nagata, Yoshifumi Okamoto, Tetsuya Morita, Akihiro Shimura +2 more | 2002-04-09 |
| 6350703 | Semiconductor substrate and production method thereof | Kiyofumi Sakaguchi | 2002-02-26 |
| 6335269 | Semiconductor substrate and method for producing the same | — | 2002-01-01 |