Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6430327 | Optical module and manufacturing method thereof | Yoshinobu Kaneyama, Masahiko Fujiwara, Sakae Kitajo, Mikio Oda, Yuzo Shimada | 2002-08-06 |
| 6407367 | Heat treatment apparatus, heat treatment process employing the same, and process for producing semiconductor article | Nobuhiko Sato | 2002-06-18 |