Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451670 | Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate fabrication method | Toru Takisawa, Takao Yonehara | 2002-09-17 |
| 6428620 | Substrate processing method and apparatus and SOI substrate | Kiyofumi Sakaguchi | 2002-08-06 |
| 6417069 | Substrate processing method and manufacturing method, and anodizing apparatus | Kiyofumi Sakaguchi, Satoshi Matsumura | 2002-07-09 |
| 6410436 | Method of cleaning porous body, and process for producing porous body, non-porous film or bonded substrate | Satoshi Matsumura | 2002-06-25 |
| 6383890 | Wafer bonding method, apparatus and vacuum chuck | Toru Takisawa, Takao Yonehara | 2002-05-07 |