Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399511 | Plasma etch process in a single inter-level dielectric etch | Betty Tang | 2002-06-04 |
| 6380096 | In-situ integrated oxide etch process particularly useful for copper dual damascene | Hoiman Hung, Joseph P. Caulfield, Sum-Yee Betty Tang, Tianzong Xu | 2002-04-30 |
| 6361705 | Plasma process for selectively etching oxide using fluoropropane or fluoropropylene | Ruiping Wang, Gerald Yin, Hao Lu, Robert Wu | 2002-03-26 |