Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387287 | Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window | Hoiman Hung, Hongqing Shan, Ruiping Wang, Gerald Yin | 2002-05-14 |
| 6380096 | In-situ integrated oxide etch process particularly useful for copper dual damascene | Hoiman Hung, Sum-Yee Betty Tang, Jian Ding, Tianzong Xu | 2002-04-30 |