Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380096 | In-situ integrated oxide etch process particularly useful for copper dual damascene | Hoiman Hung, Joseph P. Caulfield, Sum-Yee Betty Tang, Jian Ding | 2002-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380096 | In-situ integrated oxide etch process particularly useful for copper dual damascene | Hoiman Hung, Joseph P. Caulfield, Sum-Yee Betty Tang, Jian Ding | 2002-04-30 |