Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361705 | Plasma process for selectively etching oxide using fluoropropane or fluoropropylene | Ruiping Wang, Gerald Yin, Robert Wu, Jian Ding | 2002-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361705 | Plasma process for selectively etching oxide using fluoropropane or fluoropropylene | Ruiping Wang, Gerald Yin, Robert Wu, Jian Ding | 2002-03-26 |