Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6484064 | Method and apparatus for running metrology standard wafer routes for cross-fab metrology calibration | — | 2002-11-19 |
| 6475280 | Coating machine for applying and drying photosensitive emulsion on a plastic film | Dennis M. Burgess | 2002-11-05 |
| 6454899 | Apparatus for filling trenches | H. Jim Fulford, Christopher H. Raeder, Craig W. Christian, Thomas J. Sonderman | 2002-09-24 |
| 6376261 | Method for varying nitride strip makeup process based on field oxide loss and defect count | — | 2002-04-23 |
| 6360133 | Method and apparatus for automatic routing for reentrant process | Anthony J. Toprac, Christopher A. Bone | 2002-03-19 |
| 6352867 | Method of controlling feature dimensions based upon etch chemistry concentrations | Terri A. Couteau, Anthony J. Toprac | 2002-03-05 |
| 6350179 | Method for determining a polishing recipe based upon the measured pre-polish thickness of a process layer | Jeremy Lansford | 2002-02-26 |