Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492275 | Control of transistor performance through adjustment of spacer oxide profile with a wet etch | Deborah J. Riley | 2002-12-10 |
| 6352867 | Method of controlling feature dimensions based upon etch chemistry concentrations | William J. Campbell, Anthony J. Toprac | 2002-03-05 |
| 6348289 | System and method for controlling polysilicon feature critical dimension during processing | W. Jarrett Campbell, Anthony J. Toprac | 2002-02-19 |