Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470230 | Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication | Anthony J. Toprac, Michael L. Miller | 2002-10-22 |
| 6465263 | Method and apparatus for implementing corrected species by monitoring specific state parameters | Elfido Coss, Jr., Robert Anderson | 2002-10-15 |
| 6454899 | Apparatus for filling trenches | William J. Campbell, H. Jim Fulford, Christopher H. Raeder, Craig W. Christian | 2002-09-24 |
| 6449524 | Method and apparatus for using equipment state data for run-to-run control of manufacturing tools | Michael L. Miller | 2002-09-10 |
| 6444481 | Method and apparatus for controlling a plating process | Alexander J. Pasadyn | 2002-09-03 |
| 6387823 | Method and apparatus for controlling deposition process using residual gas analysis | Anthony J. Toprac | 2002-05-14 |