Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465263 | Method and apparatus for implementing corrected species by monitoring specific state parameters | Elfido Coss, Jr., Thomas J. Sonderman | 2002-10-15 |
| 6383874 | In-situ stack for high volume production of isolation regions | Sey-Ping Sun, Mark I. Gardner | 2002-05-07 |