Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465263 | Method and apparatus for implementing corrected species by monitoring specific state parameters | Thomas J. Sonderman, Robert Anderson | 2002-10-15 |
| 6457587 | Integrated reticle sorter and stocker | Michael R. Conboy, Russel Shirley | 2002-10-01 |
| 6449522 | Managing a semiconductor fabrication facility using wafer lot and cassette attributes | Michael R. Conboy, Patrick J. Ryan | 2002-09-10 |
| 6446022 | Wafer fabrication system providing measurement data screening | Brian K. Cusson, Mike Simpson | 2002-09-03 |
| 6440821 | Method and apparatus for aligning wafers | Michael R. Conboy, Sam Allen | 2002-08-27 |
| 6431814 | Integrated wafer stocker and sorter with integrity verification system | Eric Christensen, Russel Shirley, Michael R. Conboy | 2002-08-13 |
| 6411859 | Flow control in a semiconductor fabrication facility | Michael R. Conboy, Patrick J. Ryan | 2002-06-25 |
| 6403905 | Reticle stocking and sorting management system | Michael R. Conboy, Russel Shirley | 2002-06-11 |
| 6392403 | Integrated wafer stocker and sorter apparatus | Michael R. Conboy, Russel Shirley, Eric Christensen | 2002-05-21 |
| 6356804 | Automated material handling system method and arrangement | Michael R. Conboy, Patrick J. Ryan | 2002-03-12 |
| 6338005 | Managing test material in an automated material handling system | Michael R. Conboy, Patrick J. Ryan | 2002-01-08 |