Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492281 | Method of fabricating conductor structures with metal comb bridging avoidance | Shengnian Song, Bradley Marc Davis | 2002-12-10 |
| 6417014 | Method and apparatus for reducing wafer to wafer deposition variation | Kin-Sang Lam | 2002-07-09 |
| 6383874 | In-situ stack for high volume production of isolation regions | Mark I. Gardner, Robert Anderson | 2002-05-07 |
| 6372668 | Method of forming silicon oxynitride films | Homi E. Nariman, Hartmut Ruelke | 2002-04-16 |