Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372668 | Method of forming silicon oxynitride films | Sey-Ping Sun, Hartmut Ruelke | 2002-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372668 | Method of forming silicon oxynitride films | Sey-Ping Sun, Hartmut Ruelke | 2002-04-16 |