Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372668 | Method of forming silicon oxynitride films | Sey-Ping Sun, Homi E. Nariman | 2002-04-16 |
| 6368948 | Method of forming capped copper interconnects with reduced hillocks | Minh Van Ngo, Joerg Hohage, Lothar Mergili | 2002-04-09 |