Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500681 | Run-to-run etch control by feeding forward measured metal thickness | H. Jim Fulford | 2002-12-31 |
| 6469518 | Method and apparatus for determining measurement frequency based on hardware age and usage | Bradley Marc Davis, Allen L. Evans | 2002-10-22 |
| 6454899 | Apparatus for filling trenches | William J. Campbell, H. Jim Fulford, Christopher H. Raeder, Thomas J. Sonderman | 2002-09-24 |
| 6403151 | Method for controlling optical properties of antireflective coatings | Bradley Marc Davis, Allen L. Evans | 2002-06-11 |