Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454899 | Apparatus for filling trenches | William J. Campbell, H. Jim Fulford, Craig W. Christian, Thomas J. Sonderman | 2002-09-24 |
| 6452180 | Infrared inspection for determining residual films on semiconductor devices | John L. Nistler | 2002-09-17 |
| 6444564 | Method and product for improved use of low k dielectric material among integrated circuit interconnect structures | — | 2002-09-03 |
| 6379216 | Rotary chemical-mechanical polishing apparatus employing multiple fluid-bearing platens for semiconductor fabrication | — | 2002-04-30 |