Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452180 | Infrared inspection for determining residual films on semiconductor devices | Christopher H. Raeder | 2002-09-17 |
| 6410191 | Phase-shift photomask for patterning high density features | Stuart E. Brown | 2002-06-25 |