Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485990 | Feed-forward control of an etch processing tool | — | 2002-11-26 |
| 6461878 | Feedback control of strip time to reduce post strip critical dimension variation in a transistor gate electrode | — | 2002-10-08 |
| 6362116 | Method for controlling photoresist baking processes | — | 2002-03-26 |
| 6352870 | Method of endpointing plasma strip process by measuring wafer temperature | — | 2002-03-05 |
| 6350179 | Method for determining a polishing recipe based upon the measured pre-polish thickness of a process layer | William J. Campbell | 2002-02-26 |
| 6335286 | Feedback control of polish buff time as a function of scratch count | — | 2002-01-01 |