Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5636098 | Barrier seal for electrostatic chuck | Joseph F. Salfelder, Dennis S. Grimard, Chandra Deshpandey, Robert E. Ryan, Michael G. Chafin | 1997-06-03 |
| 5631803 | Erosion resistant electrostatic chuck with improved cooling system | Joseph F. Salfelder, Chandra Deshpandey | 1997-05-20 |
| 5606485 | Electrostatic chuck having improved erosion resistance | Shamouil Shamouilian | 1997-02-25 |
| 5592358 | Electrostatic chuck for magnetic flux processing | Shamouil Shamouilian, Chandra Deshpandey, Yuh-Jia Su | 1997-01-07 |