Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639334 | Uniform gas flow arrangements | Anthony J. Canale, Randy Dean Cox, Tracy C. Hetrick | 1997-06-17 |
| 5636098 | Barrier seal for electrostatic chuck | Joseph F. Salfelder, John F. Cameron, Chandra Deshpandey, Robert E. Ryan, Michael G. Chafin | 1997-06-03 |
| 5605603 | Deep trench process | Neal P. Marmillion | 1997-02-25 |