Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5636098 | Barrier seal for electrostatic chuck | Joseph F. Salfelder, Dennis S. Grimard, John F. Cameron, Chandra Deshpandey, Robert E. Ryan | 1997-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5636098 | Barrier seal for electrostatic chuck | Joseph F. Salfelder, Dennis S. Grimard, John F. Cameron, Chandra Deshpandey, Robert E. Ryan | 1997-06-03 |