Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5636098 | Barrier seal for electrostatic chuck | Dennis S. Grimard, John F. Cameron, Chandra Deshpandey, Robert E. Ryan, Michael G. Chafin | 1997-06-03 |
| 5631803 | Erosion resistant electrostatic chuck with improved cooling system | John F. Cameron, Chandra Deshpandey | 1997-05-20 |