Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685914 | Focus ring for semiconductor wafer processing in a plasma reactor | Graham W. Hills, Yuh-Jia Su, Yoshiaki Tanase | 1997-11-11 |
| 5636098 | Barrier seal for electrostatic chuck | Joseph F. Salfelder, Dennis S. Grimard, John F. Cameron, Chandra Deshpandey, Michael G. Chafin | 1997-06-03 |