Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685914 | Focus ring for semiconductor wafer processing in a plasma reactor | Graham W. Hills, Yuh-Jia Su, Robert E. Ryan | 1997-11-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685914 | Focus ring for semiconductor wafer processing in a plasma reactor | Graham W. Hills, Yuh-Jia Su, Robert E. Ryan | 1997-11-11 |