Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685914 | Focus ring for semiconductor wafer processing in a plasma reactor | Graham W. Hills, Yoshiaki Tanase, Robert E. Ryan | 1997-11-11 |
| 5607602 | High-rate dry-etch of indium and tin oxides by hydrogen and halogen radicals such as derived from HCl gas | Yuen-Kui Wong, Kam S. Law, Haruhiro Harry Goto | 1997-03-04 |
| 5592358 | Electrostatic chuck for magnetic flux processing | Shamouil Shamouilian, John F. Cameron, Chandra Deshpandey | 1997-01-07 |