Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5671117 | Electrostatic chuck | Semyon Sherstinsky, Manoocher Birang, Alfred Mak, Simon W. Tam | 1997-09-23 |
| 5646814 | Multi-electrode electrostatic chuck | Samuel Broydo, Manoocher Birang | 1997-07-08 |
| 5634266 | Method of making a dielectric chuck | Semyon Sherstinsky, Manoocher Birang, Alfred Mak, Simon W. Tam | 1997-06-03 |
| 5606485 | Electrostatic chuck having improved erosion resistance | John F. Cameron | 1997-02-25 |
| 5592358 | Electrostatic chuck for magnetic flux processing | John F. Cameron, Chandra Deshpandey, Yuh-Jia Su | 1997-01-07 |