Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5671117 | Electrostatic chuck | Semyon Sherstinsky, Shamouil Shamouilian, Manoocher Birang, Alfred Mak | 1997-09-23 |
| 5634266 | Method of making a dielectric chuck | Semyon Sherstinsky, Shamouil Shamouilian, Manoocher Birang, Alfred Mak | 1997-06-03 |