Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5673922 | Apparatus for centering substrates on support members | Alfred Mak, Leonel A. Zuniga, Ling Chen | 1997-10-07 |
| 5671117 | Electrostatic chuck | Shamouil Shamouilian, Manoocher Birang, Alfred Mak, Simon W. Tam | 1997-09-23 |
| 5634266 | Method of making a dielectric chuck | Shamouil Shamouilian, Manoocher Birang, Alfred Mak, Simon W. Tam | 1997-06-03 |