Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5671117 | Electrostatic chuck | Semyon Sherstinsky, Shamouil Shamouilian, Alfred Mak, Simon W. Tam | 1997-09-23 |
| 5646814 | Multi-electrode electrostatic chuck | Shamouil Shamouilian, Samuel Broydo | 1997-07-08 |
| 5634266 | Method of making a dielectric chuck | Semyon Sherstinsky, Shamouil Shamouilian, Alfred Mak, Simon W. Tam | 1997-06-03 |
| 5612850 | Releasing a workpiece from an electrostatic chuck | Grigory Pyatigorsky | 1997-03-18 |