Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695817 | Method of forming a coating film | Kimio Motoda, Kenji Sekiguchi, Tsutae Omori | 1997-12-09 |
| 5688322 | Apparatus for coating resist on substrate | Kimio Motoda, Noriyuki Anai | 1997-11-18 |
| 5685039 | Cleaning apparatus | Tomoko Hamada, Mitiaki Matsushita, Akira Yonemizu | 1997-11-11 |
| 5645391 | Substrate transfer apparatus, and method of transferring substrates | Tetu Ohsawa | 1997-07-08 |
| 5626675 | Resist processing apparatus, substrate processing apparatus and method of transferring a processed article | Yasuhiro Sakamoto, Masami Akimoto, Shinzi Kitamura | 1997-05-06 |